Gases used in semiconductor manufacture are required to meet a specified purity to protect product quality. Accurate monitoring of any trace-level contamination during the production process ensures the necessary quality is achieved.
Manufacturers demand assured purity from the purified gases used. Fast, precise and reliable analysis of the gas must be carried out to ensure impurities remain within specified, very low limits.
Among the many trace impurities that must be measured are moisture, oxygen, hydrogen, carbon monoxide, carbon dioxide and hydrocarbons. In particular, gas separation requires specific monitoring for moisture and oxygen to ensure product quality.
We provide analytical solutions to monitor moisture and oxygen, using proven technologies for continuous, reliable, and accurate measurements.